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October 28, 1996Applied Physics Letters

High resolution ion scattering study of silicon oxynitridation

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Authors

HLHongcheng LuNanjing Tech UniversityEGE. P. GusevQualcomm (United Kingdom)TGT. GustafssonRutgers, The State University of New Jersey

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Cite This Study

Lu et al. (1996) studied this question.

synapsesocial.com/papers/6a838660d00caa0920fd6f01https://doi.org/10.1063/1.117687
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