Large-Displacement Micro-XY-Stage with Paired Moving Plates

An X Y -stage driven by electrostatic comb drive actuators is fabricated realizing displacements of over 100 µm for both axes. The plates are prepared in one layer of the silicon-on-insulator (SOI) wafer and the actuators are prepared in another layer. The raster scanning of the plate is realized by maintaining orthogonal x - and y -movements. The fast scanning is along the y -axis. Paired 820 × 950-µm 2 -size media plates are driven at the mutually opposite y -directions canceling the inertial force. The static maximum displacements are 110 µm (geometrical limit) for the x -axis and 90 µm for the y -axis. At the resonance state, 115 µm (geometrical limit) is obtained for the y -axis.