Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties

High Tc superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO3 substrates (100) or (110) and followed by a post O2 annealing at 825 °C.