Low Temperature Preparation of As-Sputtered Superconducting YBaCuO Thin Films by Magnetron Sputtering

Superconducting YBa 2 Cu 3 O 7-δ thin films were prepared on SrTiO 3 (100) planes at 560°C by rf multitarget magnetron sputtering without postannealing. The films were composed of two differently oriented grains with the c or a axis perpendicular to the surface. The preferential orientation could be controlled by the preparation condition. The transition to a superconducting state started at 90 K and zero resistance was achieved at 80 K for the films.