Describes how an argon ion gun intended for sputter cleaning, and a quadrupole residual gas analyser (QRGA) have been adapted for use in low current, low energy secondary ion mass spectroscopy (SIMS). Minor external modifications including the fitting of a new type of axial electrostatic energy filter in front of the QRGA make secondary ion detection feasible. The spectrometer may be used for surface analysis; secondary ion spectra are presented from stainless steel type 316, and from mica and sapphire.
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Dowsett et al. (1975) studied this question.
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