A surface-discharge microplasma device (SMD) was developed for the decomposition of volatile organic compounds (VOCs) in the gas phase. The device is composed of a microscale-patterned electrode, a dielectric substrate, and a ground electrode. As a result of localized dielectric barrier discharge (DBD), surface-discharge microplasma was generated when a piezoelectric-transformed high voltage (66.7 kHz, 3.5 kV) was applied to the microscale-patterned electrode. The discharge current and voltage characteristics of the DBD were analyzed under atmospheric conditions. Toluene decomposition rate was evaluated by gas chromatography–mass spectrometry and nondispersive IR-absorption CO 2 analysis. A decomposition efficiency of more than 99% was achieved in batch experiments. When the SMD was operated in a flow reactor, 30–80% of toluene was reduced with the percentage depending on residence time. The carbon balance between the toluene starting material and the CO 2 product indicates that toluene was almost completely decomposed into CO 2 by atomic oxygen in the microplasma.
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Seto et al. (2005) studied this question.
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