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Calculation of the ohmic contact resistance at a metal/Si interface shows that the lower limit of the contact resistance is in the order of 10—9 Ω cm2, which is somewhat lower than the minimum of the experimental data. However, the calculated contact resistances of Pd2Si/Si and (Al–Si) alloy/Si interfaces approximately agreed with the experimental data.
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A. Kikuchi (1999) studied this question.
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