Micromachined polycrystalline thin film temperature sensors

Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy-light-heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.