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December 3, 1990Applied Physics Letters

Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on silicon

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TSToshiyuki SakumaNihon UniversitySYShintaro YamamichiNEC (Japan)SMS. MatsubaraNagoya Institute of Technology

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Sakuma et al. (1990) studied this question.

synapsesocial.com/papers/6a843cf7c7e37ebe3168cdeahttps://doi.org/10.1063/1.103867
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