Characterization of layered synthetic microstructure by transmission electron microscopy and diffraction

Transmission electron diffraction patterns related to the cross section of layered synthetic microstructures (LSM's) are obtained. By depositing the multilayers onto (111) orientation silicon single-crystal substrates, it is possible to obtain on the same plate both the LSM diffraction pattern and a calibrated one and thus to measure the LSM mean period accurately. Results concerning tungsten-carbon LSM's are presented.