Expansion of amorphous carbon in W/C multilayers after annealing

Dynamical optical dispersion theory is employed to analyze the variations of the positions and intensities of x-ray diffraction peaks from the W/C multilayer. It is confirmed that the thickness of the C layer expands with the annealing temperature and the multilayer remains undamaged until 800 °C. There is an obvious drop of interfacial root mean square (rms) roughness at 600–800 °C.