Development of YBCO Patterned Multi-Filamentary Film Using Photolithography Method

High-temperature superconducting (HTS)-coated conductors (CCs) can be applied to magnets under low temperature and high magnetic field conditions, as well as in electric power equipment. Reducing the screening current and AC loss is an important topic for practical applications. In this study, we propose a multifilamentary YBCO thin film, fabricated by depositing YBCO on a substrate with elevated Zr stripes patterned by using photolithography techniques. While the thin film exhibited superconductivity, the crystal grain orientation was disturbed above the stripe, which locally inhibited the superconducting current flow. The results of this study indicate that a continuous YBCO film can be dividing into separate superconducting filaments by locally suppressing the good grain alignment required for a high intergrainJcwith Zr stripes between the STO substrate and the YBCO film.