Epitaxy and Orientation of Eu₁Ba₂Cu₃O7-y Films Grown In Situ by Magnetron Sputtering

Superconducting films of Eu 1 Ba 2 Cu 3 O 7- y have been grown in situ onto SrTiO 3 and MgO (100) substrates by magnetron sputtering from a stoichiometric oxide target. The sputtering process results in the growth of epitaxial films with perfect a -axis orientation as well as perfect c -axis orientation. The orientation of the films can be controlled by the proper choices of substrate temperature, oxygen pressure, and film growth rate. The routine production of films showing T c zero of 88–90 K is accomplished. In situ growth of the films with the particular orientation is of importance in the fabrication of multilayer structures such as tunnel junctions.