Y-Ba-Cu-O superconducting films prepared on SrTiO3 substrates by chemical vapor deposition

High Tc superconducting YBa2 Cu3 O7−x films were prepared by chemical vapor deposition using β-diketonates of Y, Ba, and Cu as source materials. The films were epitaxially grown on SrTiO3 (100) substrates. The c-axis orientation perpendicular to the plane of the substrates was observed. A sharp resistive superconducting transition with Tc (R=0) at 84 K was obtained. The maximum critical-current density at 77 K was 2×104 A/cm2 .