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January 1, 1978Journal of Vacuum Science and Technology

Calculation of deposition rates in diode sputtering systems

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WWW. D. WestwoodNatural Sciences and Engineering Research Council

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W. D. Westwood (1978) studied this question.

synapsesocial.com/papers/6a84fc62cba32192a79ea65ahttps://doi.org/10.1116/1.569429
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