2-D Grating Graphoepitaxy of Silicon Films from Silicon-Gold Supersaturated Solution

Orientation controlled silicon crystalline films were prepared on fused quartz substrates. The crystallization was performed by precitipation from a Si-Au supersaturated solution. One dimensional (1-D) surface relief gratings with a period of 1 µm and two dimentional (2-D) gratings with a cross angle of 60° were used to control the crystal orientation. Silicon films were better aligned on the 2-D gratings than on the 1-D gratings. The (111) crystal plane was parallel to the substrate plane.