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September 1, 1980Applied Physics Letters

Silicon graphoepitaxy using a strip-heater oven

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Authors

MGM. W. GeisMIT Lincoln LaboratoryDAD.A. AntoniadisMassachusetts Institute of TechnologyDSD. J. SilversmithUnited States Air Force Office of Scientific Research

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Geis et al. (1980) studied this question.

synapsesocial.com/papers/6a7cfdf37c6fcb36d53b3f28https://doi.org/10.1063/1.91962
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