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October 15, 1978Applied Physics Letters

cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties

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Authors

AGA. GatLawrence Berkeley National LaboratoryLGL. GerzbergQualcomm (United Kingdom)JGJ. F. GibbonsUniversity College Dublin

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Gat et al. (1978) studied this question.

synapsesocial.com/papers/6a72f184bfabfe3aef60dadbhttps://doi.org/10.1063/1.90501
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