Hybrid techniques for electrostatic analysis of nanoelectromechanical systems

In this paper, we propose an efficient approach, namely the hybrid BIE/Poisson/Schrödinger approach, for electrostatic analysis of nanoelectromechanical systems. In this approach, the interior and the exterior domain electrostatics are described by Poisson’s equation (or Poisson’s equation coupled with Schrödinger’s equation when quantum-mechanical effects are dominant) and the boundary integral formulation (BIE) of the potential equation, respectively. We employ a meshless finite cloud method and a boundary cloud method to solve the coupled BIE/Poisson/Schrödinger’s equations self-consistently. The proposed approach significantly reduces the computational cost and provides a higher accuracy of the solution.