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October 31, 1975Soviet Journal of Quantum ElectronicsOpen Access

Use of argon laser radiation in restoration of single-crystal state of ion-implantation-amorphized silicon surface

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АКА. Г. КлименкоKeldysh Institute of Applied MathematicsEKE. A. KlimenkoInstitute of Semiconductor PhysicsVDV. I. DoninRussian Academy of Sciences

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Клименко et al. (1975) studied this question.

synapsesocial.com/papers/6a853cd238b24859dfd6a73dhttps://doi.org/10.1070/qe1975v005n10abeh012078
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