We propose a novel fabrication process for monolithic multielement laser diodes and demonstrate the performance of a monolithically integrated passive waveguide laser as compared with a conventional laser fabricated under the same procedures. This process, which is based on silicon ion implantation and two-step MOVPE growth, is suitable for integrating optical elements like gratings and rib waveguides. We also demonstrate that the COD level of the window structure laser fabricated by this process is more than 1.3 W in pulsed operation.
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Hirata et al. (1989) studied this question.
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