Development of a high-resolution x-ray imaging system with a charge-coupled-device detector coupled with crystal x-ray magnifiers

A high-spatial-resolution x-ray imaging system for microscopic use has been developed, which utilizes a charge-coupled-device (CCD) detector as an imaging device. The spatial resolution of the x-ray CCD detector with Gd2O2S:Tb is 8.0 μm in terms of the full width at half-maximum of the line-spread function with a conversion gain of 0.58 e-h/xph. In order to obtain a higher spatial resolution, x-ray magnifiers based on asymmetric Si(111) Bragg reflections are placed in front of the x-ray CCD detector. The spatial resolution of this imaging system has been improved to 1.2 μm.