We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 kΩ are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm3. The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.
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Liu et al. (2012) studied this question.
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