Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
July 24, 2009Measurement Science and Technology

Piezoelectric MEMS sensors: state-of-the-art and perspectives

View Full Paper
Ask AI
Bookmark
Share

Authors

STSrinivas TadigadapaBoston UniversityKMKiron MatetiNaval Surface Warfare Center

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Tadigadapa et al. (2009) studied this question.

synapsesocial.com/papers/69e17c0520b7100e21b97032https://doi.org/10.1088/0957-0233/20/9/092001
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Selective inductively coupled plasma etching of group-III nitrides in Cl2- and BCl3-based plasmas1998 · 67 citations
  2. 2Ferroelectric thin films: Review of materials, properties, and applications2006 · 1,915 citations