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January 1, 2001IEEE Transactions on Electron Devices

An insulator-lined silicon substrate-via technology with high aspect ratio

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JWJ.H. WuZhejiang Shuren UniversityJSJörg ScholvinMcGovern Institute for Brain ResearchJAJesús A. del AlamoOncovision (Spain)

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Wu et al. (2001) studied this question.

synapsesocial.com/papers/6a8558fc9df929a58fad96d3https://doi.org/10.1109/16.944215
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