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Ultrathin films of titanium (hydr)oxide with precise control over film thickness (via number of cycles) can be prepared by the alternate adsorption of an organic polyelectrolyte and a titanium lactate complex, followed by calcination. Thereafter, the layer appears to be composed of nanometer-sized particles with a fused nodular morphology. The Figure shows a cross-sectional SEM of the final product on silicon.
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Rouse et al. (2002) studied this question.
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