Experimental results are presented regarding the changes in optical reflectivity of 31p+-implanted Si as a function of implantation energy. Three curves of R vs E are obtained for low, intermediate, and high doses. Each of them exhibits distinctly different reflectivity functions. However, they all indicate that the optical behavior at λ=632.8 nm is dominated by optical interference in the damaged layer and the crystalline silicon.
No takes yet. Share an insight, caveat, or question.
Aharoni et al. (1984) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: