Pseudomorphic In0.18Ga0.82As single quantum wells (QWs) have been grown by metalorganic chemical vapor deposition (MOCVD) on patterned substrates with mesa sizes of 3.5 μm oriented along [110] and [11̄0] directions. Using a post-growth masking technique, photoluminescence (PL) has been used to characterize the optical properties of the as-grown QWs. Our results show the increase of the critical thickness by about 50% for growth on [110] undercut mesa as compared with that on the planar substrate due to the discontinuous growth behavior and no increase of critical thickness of [11̄0] oriented mesas due to the continuous growth behavior and outdiffusion of In from the facet wall of the groove to the mesa top.
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Zou et al. (1991) studied this question.
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