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January 1, 1969IEEE Transactions on Instrumentation and Measurement

Design and Construction of a Direct-Plotting Capacitance Inverse-Doping Profiler for Semiconductor Evaluation

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RSR. SpiwakNTT (Japan)

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R. Spiwak (1969) studied this question.

synapsesocial.com/papers/6a85caa9e54a638bbf3d9e61https://doi.org/10.1109/tim.1969.4313800
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  1. 1A technique for directly plotting the inverse doping profile of semiconductor wafers1969 · 112 citations
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