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May 1, 1969IEEE Transactions on Electron Devices

A technique for directly plotting the inverse doping profile of semiconductor wafers

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JCJ.A. CopelandGeorgia Institute of Technology

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J.A. Copeland (1969) studied this question.

synapsesocial.com/papers/6a70fe3c439bab0cabc36912https://doi.org/10.1109/t-ed.1969.16775
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