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October 1, 1962Journal of the Physical Society of Japan

Diffusion of Phosphorus into Silicon

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SMShun-ichi MaekawaKobe Steel (Japan)

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Shun-ichi Maekawa (1962) studied this question.

synapsesocial.com/papers/6a85cd4527398d2990ae9f18https://doi.org/10.1143/jpsj.17.1592
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Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Field-Enhanced Donor Diffusion in Degenerate Semiconductor Layers1961 · 32 citations
  2. 2Evaluation of the Surface Concentration of Diffused Layers in Silicon1958 · 66 citations
  3. 3The Diffusion of Phosphorus in Silicon1962 · 61 citations
  4. 4Diffusion of Donor and Acceptor Elements in Silicon1956 · 338 citations