High performance ZnO nanowire field effect transistor using self-aligned nanogap gate electrodes

A field effect transistor (FET) using a zinc oxide nanowire with significantly enhanced performance is demonstrated. The device consists of single nanowire and self-aligned gate electrodes with well defined nanosize gaps separating them from the suspended nanowire. The fabricated FET exhibits excellent performance with a transconductance of 3.06μS, a field effect mobility of 928cm2∕Vs, and an on/off current ratio of 106. The electrical characteristics are the best obtained to date for a ZnO transistor. The FET has a n-type channel and operates in enhancement mode. The results are close to those reported previously for p-type carbon nanotube (CNT) FETs. This raises the possibility of using ZnO as the n-type FET with a CNT as the p-type FET in nanoscale complementary logic circuits.