Optical properties of evaporated platinum films in the vacuum ultraviolet from 220 Å to 150 Å

Measurements of the optical properties of Pt films deposited on either hot or room temperature substrates have shown that the wavelength dependence of the optical properties is not altered significantly by the substrate temperature. There is a change, however, in the values of the extinction coefficient which increase with increasing substrate temperature. This is also true of the reflectance values. In addition, Pt films deposited on heated substrates have better adhesion, are more resistant to abrasion damage, and have less internal stresses. If, however, Pt is to be deposited on a replica diffraction grating, it must be done at room temperature to prevent damage to the grating.