The Monte‐Carlo model of individual collisions is applied for low energy electron transport calculations. The applicability of this model is analyzed in detail with theoretically calculated cross sections. Some semiempirical relations for the most important characteristics of the transmission, backscattering, and absorbed energy distributions for C, Mg, Al, Si, Ge, Bi solid targets are obtained.
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Akkerman et al. (1980) studied this question.
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