Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
May 15, 1981Applied Physics Letters

Self-annealing of ion-implanted silicon: First experimental results

View Full Paper
Ask AI
Bookmark
Share

Authors

GCG. CembaliBologna Research AreaPMP. G. MerliUniversity of MinnesotaFZF. ZignaniNational Renewable Energy Laboratory

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Cembali et al. (1981) studied this question.

synapsesocial.com/papers/6a865c812ffec2cf765ae76dhttps://doi.org/10.1063/1.92139
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 3 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Self annealing of ion implanted silicon: suggestion for an experiment1980 · 10 citations
  2. 2Ion beam annealing of semiconductors1980 · 105 citations
  3. 3Characterisation of multiple-scan electron beam annealing method1980 · 32 citations