In Situ X-Ray Chemical Analysis of Y₁Ba₂Cu₃O7-x Films by Reflection-High-Energy-Electron-Diffraction Total-Reflection-Angle X-Ray Spectroscopy

Both the surface crystalline structure and chemical composition of Y-Ba-Cu-O film were examined in situ using reflection-high-energy-electron-diffraction and total-reflection-angle X-ray spectroscopy (RHEED-TRAXS). The chemical composition determined by TRAXS agreed well with that determined by inductively coupled plasma spectroscopy. The compositional deviation from Y 1 Ba 2 Cu 3 O 7- x affected the surface crystalline structure of films, as was detected by RHEED and confirmed by scanning electron microscopy. RHEED-TRAXS is a powerful tool for in situ examination of the crystal growth of Y-Ba-Cu-O films.