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Niobium titanium nitride (NbTiN) thin films were deposited on a selection of different substrates to explore the optimum depositing condition of high-quality NbTiN thin films. The NbTiN films deposited on MgO,Al₂ O₃, and fused quartz substrates showed excellent superconducting properties with a highTCof 14.7 K, 14.5 K, 15.2 K, and low resistivityρ_20\ Kof 55μΩ cm, 116μΩ cm, 78μΩ cm, respectively. The chemical composition, crystal structure, and relationship between superconducting properties and crystal structure were systematically investigated by changing theN₂/( Ar+ N₂)ratio in sputtering gases. The lattice parameter systematically changed asN₂/( Ar+ N₂)ratio was varied. We found that the superconducting properties depend on the lattice parameter, and the film with the best superconducting properties had a lattice parameter of 4.380(on MgO), 4.345(onAl₂ O₃), 4.335(on fused quartz).
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Makise et al. (2010) studied this question.
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