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March 2, 1987Applied Physics Letters

Continuum modeling of argon radio frequency glow discharges

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Authors

ARAlbert D. RichardsMassachusetts Institute of TechnologyBTBrian E. ThompsonN5 Sensors (United States)HSHerbert H. SawinMassachusetts Institute of Technology

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Richards et al. (1987) studied this question.

synapsesocial.com/papers/6a86a109a94eefd7bf51336ahttps://doi.org/10.1063/1.98183
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