Novel Scanning Probe Microscope for Local Elasticity Measurement

A novel scanning probe technique was developed by combining an atomic force microscope (AFM) and a quartz crystal resonator (QCR). The resonant frequency of the QCR increased when the AFM tip was placed in contact with the QCR surface and increased further when the force applied to the QCR surface increased. The frequency increase depended on the material with which the tip was in contact and seemed to reflect the local elasticity of the sample. Imaging of the material distribution on a surface was demonstrated for a pattern of polymer and gold by mapping the frequency shift of the QCR as a function of the horizontal position of the AFM tip while scanning the AFM tip over the QCR surface in constant force mode.