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July 1, 1989Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Stress and microstructure in tungsten sputtered thin films

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Authors

AHAnne‐Marie Haghiri‐GosnetCentre National de la Recherche ScientifiqueFLF. R. LadanUniversité Paris CitéCMCharly MayeuxUniversity of Tartu

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Haghiri‐Gosnet et al. (1989) studied this question.

synapsesocial.com/papers/6a86bb333f44447e627caeb3https://doi.org/10.1116/1.575770
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