Development of One Period of a Three-Dimensional Photonic Crystal in the 5–10 µm Wavelength Region by Wafer Fusion and Laser Beam Diffraction Pattern Observation Techniques

One period of a three-dimensional photonic crystal operating in the 5∼10-µm-wavelength region is developed, where four layers having a striped pattern are stacked using a wafer fusion and the alignment method based on a laser beam diffraction pattern observation technique. By measuring the transmission spectrum, considerable attenuation (of about 16 dB) is successfully achieved and is in good agreement with the theoretical calculation.