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May 1, 1981Journal of The Electrochemical Society

Studies of Phosphorus Pile‐Up at the Si ‐ SiO2 Interface Using Auger Sputter Profiling

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SSS. A. SchwarzUniversity of California, Santa BarbaraRBR. BartonDuPont (United States)CHChu Po HoHong Kong Polytechnic University

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Schwarz et al. (1981) studied this question.

synapsesocial.com/papers/6a86c3d02174986a53ca040ahttps://doi.org/10.1149/1.2127559
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