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October 1, 1984Journal of The Electrochemical SocietyOpen Access

Phosphorus‐Doped Polycrystalline Silicon via LPCVD: I . Process Characterization

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BMB.S. MeyersonJohannes Kepler University of LinzWOWilliam L. OlbrichtCalifornia Institute of Technology

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Cite This Study

Meyerson et al. (1984) studied this question.

synapsesocial.com/papers/6a86dfb4c026610cc182b6cehttps://doi.org/10.1149/1.2115258
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