Fabrication of Periodic Submicron Dot Structures of N-InP by Laser-Induced Surface Electromagnetic Wave Etching

Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2 µm. Periods along two perpendicular axes were 0.38 µm and 0.57 µm, respectively. The periods were nearly in agreement with the calculation.