Development of a new type of self-scanned electron image sensing integrated circuit

The design and fabrication of an integrated circuit which is a position-sensitive detector for low-energy (typically up to 100 eV) charged particles are discussed. The device comprises a linear array of electron-sensing electrodes coupled to detection and readout circuitry in the form of amplifiers and counters all integrated onto a single CMOS chip. The chip is intended to replace existing position-sensitive detection systems in electron spectrometers.>