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Superconducting thin films of Y-Ba-Cu-O produced by laser ablation of nonsuperconducting targets by 1064 nm neodymium:yttrium aluminum garnet radiation in an oxygen ambient are described. Deposition rates of 100 Å/s were achieved for 1 J pulses at 30 Hz. Scanning Auger microscopy indicates phase segregated films. Optical probing of ablated flux suggests it consists of atomic and molecular fragments.
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Lynds et al. (1988) studied this question.
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