Mach–Zehnder Interferometer Electro-Optic Modulator Based on Thin-Film Lithium Niobate Valley Photonic Crystal

Thin-film lithium niobate (TFLN) electro-optic modulators (EOMs) offer distinct advantages, including high speed, broad bandwidth, and low power consumption. However, their large size hinders the density of integration, which trades off with the half-wave voltage. Photonic crystal (PC) structures can effectively reduce the device footprint via the slow-light effect; however, they experience significant losses due to fabrication defects and sharp corners. Here, we theoretically demonstrate an ultracompact Mach–Zehnder interferometer (MZI) EOM based on a TFLN valley photonic crystal (VPC) structure. The design can achieve a high forward transmittance (>0.8) due to defect-immune unidirectional propagation in the VPC, enabled by the unique spin-valley locking effect. The EOM, with a small footprint of 21 μm × 17 μm, achieves an extinction ratio of 16.13 dB and a modulation depth of 80%. The design can be experimentally fabricated using current nanofabrication techniques, making it suitable for broad applications in optical communications.