A micropositioner consisting of flexure pivoted levers with a displacement amplifying mode to enhance displacement sensor sensitivity and a displacement reducing mode to achieve high resolution is described. The micropositioner is actuated by a piezoelectric driving element controlled by a closed-loop servocircuit, and provides fast response and high repeatability. A successful application to STM is also described.
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Kunitoshi Nishimura (1991) studied this question.
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