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December 1, 1978Review of Scientific Instruments

Piezodriven 50-μm range stage with subnanometer resolution

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Authors

FSFredric ScireNational Institute of Standards and TechnologyETE. Clayton TeagueNational Institute of Standards and Technology

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Scire et al. (1978) studied this question.

synapsesocial.com/papers/6a90e05f2239ecaee33607bchttps://doi.org/10.1063/1.1135327
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