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This paper introduces a new process for fabrication of high resolution Al2O3/SiC composite microcomponents using softlithography and non-aqueous ceramic suspension. Polysilazane is used to provide both binding force and SiC composition. The shape retention and dimensions of the microcomponents were analyzed using a scanning electron microscope. Surface roughness, shrinkage, and density of the resultant sintered components were also discussed.
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Hassanin et al. (2009) studied this question.
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